AeroBar 5635

Modulated Pulse for Ultra-Clean Processes

AeroBar 5635 Modulated Pulse ionizing bar is specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.

Features

ISO 14644-12 (0.01 µm particles) ionization
ISO 14644 Class 1 (0.1 µm particles) cleanliness
Modulated pulse technology
Excellent lateral uniformity
Low field voltages
Air-assist capability
Optional software with easy-to-use interface with wide adjustability
Alarm output signal

Specifications

AeroBar 5635
Input Voltage	24 VDC ±10%
Balance	Auto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24" distance)
Ion Emission	Modulated pulse (MP) technology
Emitter Points	Single-crystal silicon emitter points
Cleanliness	Meets ISO 14644-12 ionization (0.01 mm particles or nanoparticles) and ISO 14644 Class 1 (0.1 mm particles) using 45-50% output voltage
Cleanliness	ISO 14644-1 Class 1 (Ultra-clean Silicon), ISO 14644-1 Class 4 (Fed. Std. 209e Class 10) (Tungsten)
Dimension	3.1H x 1.3W x 18/24/34/39/45/51/57/63/69/75/81/87/93L in. (78H x 34W x 450/600/850/1000/1150/1300/1450/1600/1750/1900/2050/2200/2350L mm)