In-Tool Ionizing Blower iconIn-Tool Ionizing Blower

In-Tool

In-Tool

In-Tool Ionizing blower

Model 5822i Blower is designed to meet small-footprint ionizer requirements in automated process tools, offering exceptional performance in hard disk drive manufacturing and back-end semiconductor environments. The ionizer maintains a ±3V or better balance standard and exceptional ±1V with the optional external feedback system. An internal, automatic balance correction system ensures your target is ionized accurately, presenting significant reduction in calibration and maintenance time resulting in cost savings.

Features

  • ±3V or better balance (±1V with the optional external feedback system)
  • Facility Monitoring System (FMS) connection and audible alarm
  • Separate control box
  • Cleanliness rated at ISO 14644 Class 4 (Fed. Std. 209e Class 10)
  • Separate control box for convenient positioning outside the target area

Specifications

In-Tool Ionizing blower
Input Voltage 24 VDC @ 1A from external power supply (100-240 VAC 50/60 Hz) or from tool power
Discharge Between 2-2.5 sec @ 1 ft (typ), taken in-line from the center of the fan (±1000V-100V)
Balance ±3V or better balance (±1V with the optional external feedback system)
Cleanroom Class Meets ISO 14644-1 Class 4 (Fed Std. 209E Class 10)
Dimensions Blower: 4.5H x 3.3W x 2.4D in. (11.5H x 8.3W x 6.1D cm)
Control Box: 1.0H x 5.2W x 2.4D in. (2.5H x 13.2W x 6.0D cm)
Weight Blower 1.14 lb (.51 kg); Control Box 0.56 lb (.25 kg)